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Model IMFS

Model IMFS

Instrument Applications:

  • Mass Extraction at vacuum under 0.2 psia (hard vacuum)
  • Leak Detection of 0.1 to 0.2 micron defects
  • Air measurements from 5 x 7-7 sccs
  • Intelligent Molecular Flow Sensor - operates mostly in transitional and molecular flow regimes
  • Outgassing / Premeability application
  • Calibration of leak devices
Leak Test Simulator button

Features:

  • Intelligent Molecular Flow Sensor - Operates mostly in transitional and molecular flow regimes
  • Measures mass flow, using ATC's patented ALF design
  • Measures hard vacuum to 15 psia
  • Rugged, stainless steel construction
  • No moving parts

The IGLS is a part of ATC's complete leak test instruments, portable unit, or part of a larger automated test system. The micro-flow sensor is not available by itself.

Flow Range:

IMFS Testing
  • 0-1 micrograms/min
  • 0-2.5 micrograms/min
  • 0-5 micrograms/min
  • 0-10 micrograms/min
  • 0-100 micrograms/min
  • 0-400 micrograms/min

Measurement Uncertainty: ±5% (2% optional) of reading, calibrated range.

Pressure Range:

  • 0-0.2 or 0-15 (psi-absolute)
  • Type: Absolute, capacitance
  • Measurement Uncertainty: 0.25% of Full Scale (FS)

Temperature Range:

  • Operating and Calibrated: 10 to 45°C
  • Storage: -25 to 50°C
  • Sensor Type: RTD 100 Ohms
  • Measurement uncertainty at calibrated range: 0.5°C

Resolution: 16 bits A/D and 16 bits D/A

Interface:

  • Serial port
  • Digital I/O: Start/Stop, type clamp and more…
  • Analog I/O
  • Power: 115 or 220 VAC, single phase
  • Optional: 2-line character display

Max. Differential Pressure: 0.02 psid

Gases Used:

  • Use dry non-condensing and clean gases
  • Air, Nitrogen, Helium, Argon, & Carbon Dioxide
  • Other Gases Available, consult ATC, Inc.
IGFS Mass Flow vs. Output Signal

Click to Enlarge

Print Model IMFS - PDF (358K)


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